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Micro-Stress Support-Enhanced Two-Plate Shearing Absolute Testing for Φ800 mm Interferometers
Zijia Zhao1,2, Zhiliang Zhao2,3, Yuegang Fu1
1School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, China.
Sensors (Basel, Switzerland)
|February 13, 2026
Summary
We developed a new digital laser interferometric testing technique for ultra-large-aperture optical elements. This method achieves high precision and accuracy for large optical components used in demanding applications.
Area of Science:
- Optical Engineering
- Metrology
- Precision Measurement
Background:
- Manufacturing and testing large-aperture optical elements present significant challenges.
- Demand for large-aperture optics is growing in astronomy, high-power lasers, and aerospace.
Purpose of the Study:
- To propose an ultra-large-aperture digital laser plane interferometric testing technique.
- To enable high-precision testing of large planar optical elements.
Main Methods:
- Combines two-plate shearing absolute mutual testing with micro-stress support technology.
- Utilizes digital laser interferometry for planar element testing.
Main Results:
- Successfully tested an Φ800 mm planar element with PV of 0.0923λ and RMS of 0.0114λ.
- Demonstrated fast testing speed, high resolution, and precise alignment.
- Simulation and ZYGO interferometer comparisons validated the method's effectiveness.
Conclusions:
- The proposed technique offers a novel approach for high-precision testing of large-aperture optical elements.
- Achieved minimal error and high accuracy in experimental testing.
- The method is suitable for demanding applications requiring precise optical components.
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