Expanding the zinc precursor toolbox: a comparative study of precursors for thermal ALD of ZnO thin films

Jorit Obenlüneschloß1, Rajesh Pathak2, Vepa Rozyyev2

  • 1Inorganic Materials Chemistry, Ruhr University Bochum, 44801 Bochum, Germany. a.devi@ifw-dresden.de.

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