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Lateral-mode bulk acoustic wave resonators enabled three-dimensional nanostructure array fabrication.

Wei Wei1, Zhaoxun Wang1, Yiming Liu1

  • 1State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China.

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|February 15, 2026
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Summary
This summary is machine-generated.

This study introduces a novel acoustic fabrication method for creating precise 3D surface nanostructures. The technique overcomes limitations of conventional methods, enabling rapid, customizable, and maskless nano-patterning for advanced manufacturing applications.

Keywords:
AcoustofluidicBulk acoustic waveGHzLateral-modeThree-dimensional nanostructure

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Acoustics

Background:

  • Precise fabrication of 3D surface nano-topographies is a key challenge in advanced manufacturing.
  • Conventional acoustic methods, like surface acoustic wave (SAW) devices, are limited by wavelength-dependent resolution and 2D patterning capabilities.

Purpose of the Study:

  • To demonstrate a novel fabrication strategy for customizable, area-specific, and periodic 3D surface nanostructures.
  • To overcome the resolution and patterning limitations of conventional acoustic methods.

Main Methods:

  • Utilized the enhanced lateral mode of a solidly mounted resonator (SMR).
  • Harnessed Lamb wave propagation and acoustofluidic effects for nano-fabrication.
  • Employed tunable device geometry for diverse nanostructure symmetries.

Main Results:

  • Successfully fabricated 3D surface nanostructure arrays with vertical feature sizes below 200 nm and inter-feature spacing controlled to within 5 µm.
  • Achieved rapid generation (under 10 s) of diverse nanostructure symmetries (circular, square, hexagonal, octagonal).
  • Demonstrated improved precision compared to conventional SAW methods, overcoming wavelength limitations.

Conclusions:

  • Established a rapid, efficient, and maskless route for high-fidelity nanotopography generation.
  • The developed technique enables large-scale replication of customizable 3D nanostructures.
  • Significant potential for applications in advanced manufacturing, biomedicine, microelectronics, and photonic devices.