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Direct extraction of surface vibration profiles with optical beam deflection.
Thomas J Pollei1, Adam W Behnke1, Kevin J Webb1
1School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA.
The Review of Scientific Instruments
|February 17, 2026
Summary
We developed a new optical method for precise surface displacement measurement without complex modeling. This technique accurately characterizes micro-scale device mechanical behavior and optomechanical systems.
Area of Science:
- Optomechanics
- Materials Science
- Nanotechnology
Background:
- Accurate characterization of micro-scale device mechanics is crucial.
- Existing methods for surface displacement measurement can be complex and require optical system modeling.
Purpose of the Study:
- To present a simplified optical beam deflection method for direct surface displacement measurement.
- To improve measurement accuracy by reducing procedural complexity and eliminating the need for optical system modeling.
Main Methods:
- Utilized optical beam deflection to obtain direct displacement information.
- Developed an accompanying data analysis technique.
- Applied the method to a gold-silicon nitride membrane heterostructure with laser-induced deformation.
Main Results:
- Demonstrated accurate, spatially dependent displacement measurement of a surface.
- Successfully characterized the circularly symmetric deformation of a membrane heterostructure.
- Validated the method's applicability beyond circular symmetry for other deformation profiles.
Conclusions:
- The presented optical method offers a simplified and accurate approach to surface displacement measurement.
- This technique is broadly applicable for characterizing mechanical behavior in micro-scale devices.
- The method holds significant potential for optomechanics and mechanical metamaterial research.
