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A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
Laser-Direct Printed 2D Material-Based Heterostructure for the Fabrication of Electronic Devices
Ilias Cheliotis1, Filimon Zacharatos1, Avraham Twitto2
1School of Applied Mathematics and Physical Sciences, National Technical University of Athens, Athens, Greece.
None:
Integrating two-dimensional (2D) materials into functional electronic devices remains a major challenge, requiring precise, defect-free deposition and patterning techniques. In this work, we present experimental results on the fabrication of heterostructures composed of graphene, PdSe2, and MoSe2 using the Laser-Induced Forward Transfer (LIFT) technique. This digital, maskless method enables accurate positioning and shape definition of 2D material pixels with micrometer-scale resolution. We demonstrate the assembly of vertically stacked heterostructures and the fabrication of 2D material-based pn-junctions on Si/SiO2 substrates, with monolayer graphene serving as the transparent top electrode. The pn-junctions, comprising p-type PdSe2 and n-type MoSe2, exhibit consistent and stable electrical performance across multiple devices, with operational voltages ranging from -2 to 2 V. Importantly, the integration of graphene preserves device integrity and functionality. Structural and electrical characterization was performed using Raman spectroscopy, atomic force microscopy (AFM), Scanning electron microscopy (SEM) and field-effect transistor (FET) measurements. High-quality material transfer was confirmed, with mobilities values reaching up to 1200 ± 50 cm2V- 1s- 1. These results highlight the effectiveness of LIFT for constructing complex 2D heterostructures and emphasize its potential for the scalable fabrication of high-performance electronic and optoelectronic devices.

