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Quantitative determination of lateral spatial resolution in confocal Raman microscopy using graphene cross-edge
Zhong-Jie Wang1,2, Tao Liu1,2, Xue-Lu Liu1,2
1State Key Laboratory of Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
The Review of Scientific Instruments
|February 18, 2026
Summary
This study presents a new method to measure lateral spatial resolution (LSR) in confocal Raman microscopy using graphene. Optimal LSR depends on precise laser focusing and pinhole size, crucial for nanoscale imaging.
Area of Science:
- Materials Science
- Spectroscopy
- Microscopy
Background:
- Lateral spatial resolution (LSR) is critical for confocal Raman microscopy, dictating the ability to resolve nanoscale chemical and structural details.
- Accurate LSR determination is essential for reliable micro- and nanoscale analysis.
Purpose of the Study:
- To introduce a quantitative method for determining the LSR of confocal Raman microscopes.
- To evaluate the impact of experimental parameters on LSR.
Main Methods:
- Utilized cross-edge one-dimensional Raman scan measurements on graphene edges.
- Analyzed area-sensitive G mode and edge-length-sensitive D mode intensity profiles.
- Tested objectives with varying numerical apertures (NA = 0.25-0.90) and pinhole sizes.
Main Results:
- Measured LSR values approached diffraction-limited estimates with near-zero pinhole size for high NA objectives (0.90).
- Large confocal apertures resulted in LSR values exceeding diffraction-limited predictions.
- LSR performance was sensitive to laser focusing, pinhole size, and beam expansion relative to the objective's entrance pupil.
Conclusions:
- The developed method offers a practical approach for quantitative LSR evaluation in confocal Raman microscopy.
- Precise control over laser focus, pinhole aperture, and beam diameter is vital for achieving optimal resolution.
- The findings are applicable across diverse experimental conditions and microscopy setups.
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