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Related Experiment Video
Updated: May 2, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Accessible, All-Polymer Metasurfaces: Low Effort, High Quality Factor.
Michael Hirler1, Alexander A Antonov1, Enrico Baù1
1Chair in Hybrid Nanosystems, Nanoinstitute Munich, Faculty of Physics, Ludwig-Maximilians-University, 80539 Munich, Germany.
Researchers developed a simpler method to create high-performance optical metasurfaces using a common polymer. This breakthrough makes advanced optical devices more accessible and sustainable for various applications.
Area of Science:
- Nanophotonics and Metamaterials
- Polymer Science
- Optical Engineering
Background:
- Optical metasurfaces with high quality factors are crucial for advanced optics but require complex fabrication.
- Current methods involve costly, time-consuming, multi-step processes like deposition and etching.
- These limitations hinder accessibility, scalability, and sustainability.
Purpose of the Study:
- To develop a simplified, cost-effective fabrication method for high-quality optical metasurfaces.
- To repurpose poly(methyl methacrylate) (PMMA) as a resonator material, bypassing complex etching steps.
- To demonstrate a bilayer freestanding membrane approach for enhanced optical performance.
Main Methods:
- Utilized a bilayer spin-coating technique with PMMA as the resonator material.
- Employed standard photolithography (exposure and development) without metal/dielectric deposition or etching.
- Characterized the resulting freestanding polymer membrane using scanning electron microscopy and atomic force microscopy nanoindentation.
Main Results:
- Successfully fabricated all-polymer metasurfaces with high quality factors (up to 523) at visible and near-infrared wavelengths.
- Achieved high-quality nanopatterns by circumventing etching-induced defects.
- Demonstrated geometry-based tuning of resonance line width and position, and characterized mechanical properties (spring constant, pretension).
Conclusions:
- The novel fabrication method significantly enhances accessibility and sustainability for high-performance metasurfaces.
- The all-polymer approach enables unique applications like material blending and mechanical resonance tuning.
- This technique paves the way for cost-effective, high-performance optical devices.

