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Ligand Regulation and Mechanism Study of Organotin Carboxylate Resists in DUV Lithography

Tianren Liu1,2, Yuan Chen2, Guoping Liu2

  • 1State Key Laboratory of Advanced Polymer Materials, Polymer Research Institute of Sichuan University, Chengdu 610065, China.

Inorganic Chemistry
|February 19, 2026
PubMed

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