Related Experiment Video
Updated: May 5, 2026
High Speed Sub-GHz Spectrometer for Brillouin Scattering Analysis
Published on: December 22, 2015
Compressed sensing time-domain Brillouin scattering system acoustic velocity profiler for lithium niobate thin film
Pingxu Chen1, Xianrui Shi1, Wenzheng Qiu1
1School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800 Dongchuan Road, Minhang District, Shanghai 200240, China.
Abstract:
Lithium niobate (LiNbO3) thin-film heterostructures, a critical platform for 5G acoustic filters and quantum devices, face challenges in wafer-scale acoustic uniformity control. To evaluate the spatial heterogeneity of acoustic velocity in LiNbO3/SiO2/Si multilayer heterostructures prior to device fabrication, this study developed a Compressed Sensing Time-Domain Brillouin Scattering (CS-TDBS) system. A thin-film-optimized stochastic sampling algorithm overcomes conventional TDBS efficiency constraints, enabling 20× faster measurements while maintaining signal correlation (>0.92) and spectral fidelity (>0.96). By mapping the acoustic velocity distribution on 4-in. LiNbO3 wafers, CS-TDBS has, for the first time, achieved the mapping of wafer-level acoustic velocity distribution in the open-circuit state in a non-destructive testing manner. It can accurately identify abnormal decreases in acoustic velocity in the 5 mm edge region of the wafer. The demonstrated capability for fast, non-destructive assessment of elastic properties positions CS-TDBS as a valuable solution for monitoring thin-film deposition processes in advanced heterostructure fabrication.
