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All-electronic Nanosecond-resolved Scanning Tunneling Microscopy: Facilitating the Investigation of Single Dopant Charge Dynamics
Published on: January 19, 2018
A Bayesian approach to spectroscopic depth sectioning for locating dopant atoms
Michael Deimetry1, Timothy C Petersen2, Matthew Weyland2,3
1School of Physics and Astronomy, Monash University, Melbourne, Australia.
Journal of Microscopy
|February 19, 2026
Summary
Electron energy loss spectroscopy (EELS) depth sectioning can locate dopants in 3D materials. A Bayesian framework improves accuracy by comparing experimental data with simulations, overcoming interpretation pitfalls.
Area of Science:
- Materials Science
- Nanotechnology
- Analytical Chemistry
Background:
- Precise 3D dopant localization is crucial for advanced materials and devices.
- Electron energy loss spectroscopy (EELS) depth sectioning is a promising microscopy technique for atomic-level dimensional control.
Purpose of the Study:
- To evaluate the potential of EELS depth sectioning for 3D dopant localization through simulations.
- To address dose considerations and interpretation challenges in EELS depth sectioning.
- To develop a robust method for inferring dopant depths.
Main Methods:
- Simulations of EELS depth sectioning with attention to electron dose.
- Development and application of a Bayesian framework for data interpretation.
- Comparison of simulated and experimental data to resolve interpretation pitfalls.
- Extension of the Bayesian framework for multi-dopant depth inference.
Main Results:
- EELS depth sectioning shows promise for 3D dopant localization, but requires careful interpretation.
- A Bayesian framework effectively resolves by-inspection interpretation pitfalls by comparing data to simulated references.
- Momentum resolution offers no significant advantage for depth determination in EELS.
- The Bayesian framework successfully infers depths of multiple dopants without simulating all configurations.
- Zero-loss depth sectioning is too sensitive to aberrations for reliable Bayesian analysis.
Conclusions:
- EELS depth sectioning, when analyzed within a Bayesian framework, is a viable method for 3D dopant localization.
- The developed Bayesian approach enhances the accuracy and reliability of dopant depth determination in atomic columns.
- Careful consideration of electron dose and instrumental aberrations is necessary for successful EELS depth sectioning applications.
Keywords:
Bayesian inferencecore‐lossdepth sectioningdopantselectron energy loss spectroscopyenergy‐filtered convergent beam electron diffractionMore Related Videos
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