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Millimeter-scale error correction with the frequency-adaptive dwell time optimization in spot-sized ion beam

Peng Ji, Wa Tang, Haixiang Hu

|February 20, 2026

Summary

This summary is machine-generated.

A new frequency-adaptive dwell time optimization method improves ion beam figuring (IBF) precision and efficiency for optical fabrication. This approach effectively corrects millimeter-scale errors by pre-compensating material removal, reducing machining times.

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Area of Science:

Optical fabrication
Precision engineering
Surface metrology

Background:

Millimeter-scale errors (1-10 mm) in optical fabrication are challenging for ion beam figuring (IBF).
Current dwell time calculations limit precision when error scales approach the tool influence function (TIF) size, increasing additional material removal (AMR) and machining time.
Optimizing dwell time is crucial for balancing correction accuracy and efficiency in IBF.

Purpose of the Study:

To introduce a novel frequency-adaptive dwell time optimization method for IBF.
To enhance both the precision and efficiency of correcting millimeter-scale errors in optical components.
To overcome the limitations of traditional AMR optimization, especially for higher-spatial-frequency errors.

Main Methods:

Leveraging linear time-invariant (LTI) systems and transfer functions (TF) for pre-compensation of material removal.
Developing a frequency-adaptive algorithm for dwell time calculation.
Utilizing simulations to compare the proposed method with traditional AMR optimization.
Conducting experimental validation on a shell-type structure with controlled spatial errors.

Main Results:

Simulations showed significant advantages of the frequency-adaptive method over traditional AMR, particularly for high-spatial-frequency errors.
Experimental correction of errors with spatial wavelengths from 2.6 mm to 11.2 mm was performed using a TIF with a 2 mm FWHM.
The root-mean-square (RMS) error was reduced from 5.68 nm to 0.73 nm, demonstrating substantial improvement.

Conclusions:

The frequency-adaptive dwell time optimization method is feasible and effective for precise optical surface correction.
This approach successfully addresses the trade-off between precision and efficiency in IBF for millimeter-scale errors.
The method offers a significant advancement for high-precision optical fabrication processes.