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Updated: Feb 21, 2026

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Dispersion turning point enhanced Fizeau interferometer for micro-displacement sensing.

Yuan Li, Rende Ma, Xiaoping Li

    Optics Express
    |February 20, 2026
    PubMed
    Summary
    This summary is machine-generated.

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    This study introduces a dispersion turning point (DTP) enhanced Fizeau interferometer for improved micro-displacement detection. The novel design significantly boosts sensitivity and offers an adjustable dynamic range, overcoming limitations of traditional Fizeau interferometers.

    Area of Science:

    • Optical Metrology
    • Interferometry
    • Precision Measurement

    Background:

    • Fizeau interferometers offer robustness and stability but suffer from decaying sensitivity with increased cavity length in micro-displacement detection.
    • Existing Fizeau interferometer designs face limitations in sensitivity for precise micro-displacement measurements as cavity length increases.

    Purpose of the Study:

    • To enhance the sensitivity of Fizeau interferometers for micro-displacement detection.
    • To develop a Fizeau interferometer with improved and adjustable sensitivity and dynamic range.

    Main Methods:

    • Proposed a dispersion turning point (DTP) enhanced Fizeau interferometer utilizing a quartz plate as a beam splitter.
    • Achieved DTP by adjusting the cavity length between the beam splitter's reflective coating and the test surface.

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  • Leveraged the zero-dispersion point of quartz for sensitivity attenuation when deviating from DTP.

    • Main Results:

    • Realized ultra-high sensitivity to micro-displacement when operating near the DTP.
    • Achieved a high constant sensitivity of 0.333 nm/nm over a 56 nm wavelength range.
    • Demonstrated adjustable dynamic range by tuning the DTP position.

    Conclusions:

    • The DTP-enhanced Fizeau interferometer significantly improves sensitivity for micro-displacement detection.
    • The proposed method provides a stable, polarization-independent, and tunable solution for high-precision measurements.
    • This enhanced Fizeau interferometer offers a versatile platform for various micro-displacement sensing applications.