Achieving a non-destructive ultra-smooth surface using a CeO₂ slurry modified with asphalt

With the increasing demand for non-destructive ultra-smooth surface optical components in optical systems, a polishing liquid with asphalt interface modification was proposed for small tool polishing to meet application requirements. Dodecylbenzenesulfonic acid (DBSA) promotes the dispersion of abrasive particles, improves the stability of the polishing liquid, and simultaneously reduces the contact angle. Additionally, DBSA regulates the modification effect of mineral oil (MO) on the asphalt polishing pad through emulsification. This process addresses the issue of abrasive particle accumulation on the polishing pad, reduces the average load of effective abrasive particles at the interface, and promotes material removal primarily through mechanically induced chemical bond breaking. Under a scanning area of 20 × 20 µm², the surface roughness of quartz glass reaches Ra 0.097 nm, providing what we believe to be a novel approach to achieving an ultra-smooth surface without surface or subsurface destruction.