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Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
Published on: November 30, 2012
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Telecommunication-wavelength lasing in a CMOS-compatible tilted-wave design.
Optics Express
|February 20, 2026
Summary
We developed a novel tilted-wave laser (TWL) using erbium-doped silicon-rich oxide for on-chip optical communication. This CMOS-compatible light source operates at telecommunication wavelengths, offering a viable solution for silicon photonic integrated circuits.
Area of Science:
- Photonics and Materials Science
- Integrated Optics
- Semiconductor Lasers
Background:
- Erbium-doped materials are crucial for 1.5 μm telecommunication wavelengths.
- Silicon photonic integrated circuits (Si PICs) require efficient on-chip light sources.
- Tilted-wave lasers (TWLs) offer CMOS compatibility for Si PICs.
Purpose of the Study:
- To demonstrate telecommunication-wavelength lasing of erbium ions (Er3+) in tilted-wave (TW) modes.
- To develop a CMOS-compatible on-chip light source for Si PICs.
- To investigate the performance and characteristics of Er3+-doped TWLs.
Main Methods:
- Fabrication of a waveguide-coupled tilted-wave laser (TWL) using Er3+-doped Si-rich oxide.
- Optical pumping to achieve lasing at the 1.5 μm telecommunication wavelength.
- Characterization of photoluminescence quantum yield (PLQY), optical net gain, threshold power, and lasing properties.
Main Results:
- Achieved telecommunication-wavelength lasing of Er3+ in TW modes with a PLQY of 20.6% and optical net gain of 24.3 dB·cm⁻¹.
- Demonstrated a low threshold optical pumping power of ~40 mW.
- Observed edge-emitting photoluminescence consistent with TW mode simulations and remarkable light amplification.
Conclusions:
- The Er3+-doped TWL in Si-rich oxide presents a viable on-chip light source for Si PICs.
- The study provides an optimization pathway for CMOS-compatible telecommunication wavelength light sources.
- This work advances the integration of light sources into silicon photonics.
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