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Updated: Jul 15, 2026

Fabrication and Testing of Microfluidic Optomechanical Oscillators
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Slot-mode cantilever optomechanical system for mass sensing.

C Thrideep, M Belov, W K Hiebert

    Optics Express
    |February 20, 2026
    PubMed
    Summary

    We developed a new optomechanical sensor using a photonic crystal cavity and cantilever for highly sensitive mass detection. This device achieves zeptogram-level mass sensitivity, paving the way for future advancements in nanoscale measurements.

    Area of Science:

    • Optomechanics
    • Nanotechnology
    • Materials Science

    Background:

    • Optomechanical systems leverage light-matter interactions for sensing.
    • High-sensitivity mass sensing is crucial for various scientific disciplines.
    • Photonic crystal cavities offer strong light confinement for enhanced interactions.

    Purpose of the Study:

    • To present a novel slot-mode optomechanical platform integrating a photonic crystal cavity and a cantilever resonator.
    • To achieve high optomechanical coupling and low effective mass for sensitive mass sensing.
    • To explore the potential for sub-zeptogram mass sensitivity.

    Main Methods:

    • Fabrication of devices using silicon-on-insulator substrates.
    • Integration of a one-dimensional photonic crystal cavity with a cantilever mechanical resonator.

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  • Characterization using thermomechanical noise analysis and phase-locked loop frequency tracking.

    • Main Results:

    • Demonstrated high optomechanical coupling (G/2π = 0.80 GHz/nm) and low effective mass (m_eff = 13 fg).
    • Achieved an estimated mass sensitivity of approximately 30 zeptograms (zg).
    • Identified temperature-driven cavity frequency fluctuations as a dominant noise source.

    Conclusions:

    • The cantilever-based slot-mode optomechanical platform offers enhanced dynamic range and reduced mass compared to traditional designs.
    • The demonstrated sensitivity approaches the zeptogram scale, with potential for sub-zeptogram levels.
    • Future improvements in optomechanical coupling and cavity quality factor are key to reaching sub-zeptogram sensitivity.