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Emission-Programmed Femtosecond Bessel Beams for Fabricating Micro-Nano Hierarchical Structures.

Yu Lu1, Lin Kai1, Fei Yin2,3

  • 1State Key Laboratory for Manufacturing System Engineering and Shanxi Key Laboratory of Photonics Technology for Information, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

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|February 26, 2026
PubMed
Summary

This study introduces a novel laser drilling method using a femtosecond Bessel beam to create micro-nano hierarchical structures on silicon. This technique enables precise control over structure formation for advanced applications.

Keywords:
Bessel beamfemtosecond laser manufacturingmicro–nano hierarchical structure

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Laser Physics

Background:

  • Ultrafast laser-induced micro-nano hierarchical structures are crucial for optoelectronics, functional surfaces, and biomedicine.
  • Precise control over the formation of these structures via light field manipulation is an underexplored research area.

Purpose of the Study:

  • To demonstrate a rapid drilling strategy for fabricating micro-nano hierarchical structures on silicon.
  • To explore the control of structure formation through light field manipulation using a femtosecond Bessel beam.

Main Methods:

  • Utilized an emission-programmed, high-repetition-rate femtosecond Bessel beam for rapid drilling on silicon.
  • Employed spatiotemporal modulation to integrate subtractive drilling and additive nanostructuring.
  • Implemented areal scanning with adjustable line intervals for programmable geometry control.

Main Results:

  • Successfully fabricated a micro-nano hierarchical structure comprising tapered micro-holes, elevated micropillars, and dense nanocoatings.
  • Demonstrated a synergistic manufacturing process combining subtractive and additive effects.
  • Achieved programmable geometry control through areal scanning.

Conclusions:

  • The developed laser drilling strategy offers a new method for fabricating complex micro-nano hierarchical structures.
  • This approach provides novel insights into laser-matter interactions.
  • The fabricated structures have potential applications in infrared photodetection and drag-reduction surfaces.