Updated: Feb 27, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Sergey Lychev1, Alexander Digilov1
1Ishlinsky Institute for Problems in Mechanics RAS, 119526 Moscow, Russia.
You might also read
Articles linked to this work by shared authors, journal, and citation graph.
This study introduces a new method for analyzing holographic interferometry fringe patterns, improving accuracy and reliability in displacement field measurements even with significant speckle noise. The technique enhances fringe contour analysis for better scientific data.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: