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Updated: Feb 28, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
An improved reliability factor for quantitative low-energy electron diffraction
Alexander M Imre1, Lutz Hammer2, Ulrike Diebold1
1Institute of Applied Physics, TU Wien, Vienna, Austria.
A new metric, RS, improves quantitative low-energy electron diffraction (LEED I(V)) surface structure analysis. This RS metric offers a more reliable optimization target than the traditional Pendry
Area of Science:
- Surface Science
- Materials Science
- Condensed Matter Physics
Background:
- Quantitative low-energy electron diffraction (LEED I(V)) is crucial for determining surface structures by analyzing electron diffraction intensities as a function of electron energy.
- Current analysis relies on optimizing agreement between experimental and calculated intensities, commonly using Pendry's RP metric.
- Pendry's RP metric has significant limitations, including sensitivity to noise and intensity offsets, and can yield false positives for agreement.
Purpose of the Study:
- To introduce a modified RS metric as a superior alternative to Pendry's RP for LEED I(V) analysis.
- To address the shortcomings of RP, such as its noisy nature and susceptibility to minor data variations.
- To evaluate the performance of RS in comparison to RP and RZJ under imperfect experimental conditions.
Main Methods:
- Development and implementation of a modified RS agreement metric for LEED I(V) data analysis.
- Comparative analysis of RS, Pendry's RP, and Zanazzi-Jona's RZJ metrics.
- Optimization simulations using experimental LEED I(V) data with introduced imperfections.
Main Results:
- The proposed RS metric effectively replaces RP, overcoming its limitations in optimization and sensitivity.
- RS demonstrates comparable or superior performance to RP in guiding optimization towards correct surface structures, even with noisy experimental data.
- The RZJ metric was found to be less effective than RS and RP when dealing with imperfect experimental data.
Conclusions:
- The RS metric offers a more robust and reliable approach for quantitative surface structure determination using LEED I(V).
- RS provides a better target function for optimization, reducing the likelihood of erroneous structural assignments.
- This advancement enhances the precision and reliability of surface structure analysis in materials science and surface physics.
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