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High sensitivity SAW hydrogen gas sensor based on thermal conductivity effect.

Baile Cui1, Lina Cheng2,3, Xufeng Xue1

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Microsystems & Nanoengineering
|February 26, 2026
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Summary
This summary is machine-generated.

This study presents a highly sensitive surface acoustic wave (SAW) hydrogen sensor for safety applications. The developed sensor offers wide-range detection from ppm to 100% vol with rapid response times.

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Area of Science:

  • Materials Science
  • Chemical Engineering
  • Sensor Technology

Background:

  • Hydrogen safety is paramount in aerospace and transportation.
  • Existing hydrogen sensors often lack the required sensitivity and wide detection range.
  • Surface Acoustic Wave (SAW) devices offer potential for high-performance gas sensing.

Purpose of the Study:

  • To develop a wide-range, high-sensitivity hydrogen sensor using SAW technology.
  • To establish a mechanistic model for optimizing sensor design and performance.
  • To create an integrated SAW hydrogen sensing system for practical applications.

Main Methods:

  • Developed a mechanistic model integrating thermal balance and acoustic wave equations.
  • Designed and fabricated a SAW hydrogen sensor with on-chip microheater integration.
  • Constructed a highly integrated SAW sensing system with ultra-low baseline noise.

Main Results:

  • Achieved a low detection limit of ~6 ppm and a wide detection range up to 100% vol.
  • Demonstrated rapid response and recovery times (T90/T10: ~15 s).
  • Exhibited excellent repeatability (error < 2.4%) at a low operating temperature (120 °C).

Conclusions:

  • The developed SAW sensor provides an effective solution for hydrogen leakage monitoring across unprecedented concentrations.
  • This work establishes a new paradigm for hydrogen safety applications in critical sectors.
  • The sensor's performance highlights the potential of SAW technology for advanced gas sensing.