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A High-Accuracy Solid/Liquid Composite Packaging Method for Implantable Pressure Sensors
Bo Wang1,2,3,4, Yubiao Zhang2,3,4, Yuning Huang2,3,4
1School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China.
Micromachines
|February 27, 2026
Summary
This study introduces a novel Parylene-C and silicone oil packaging for implantable pressure sensors, enhancing accuracy and stability. The composite layer effectively reduces mechanical coupling and water ingress for reliable long-term performance.
Area of Science:
- Biomedical Engineering
- Materials Science
- Sensor Technology
Background:
- Implantable pressure sensors require robust packaging for accurate measurements and environmental stability.
- Mechanical coupling and water molecule infiltration degrade sensor performance over time.
Purpose of the Study:
- To develop and validate a solid/liquid composite packaging technique for implantable pressure sensors.
- To improve measurement accuracy and long-term environmental stability of these sensors.
Main Methods:
- A composite packaging technique using Parylene-C and silicone oil was proposed.
- Finite element simulation analyzed the packaging's effect on sensor mechanics.
- Experimental validation assessed sensor accuracy and stability in simulated bodily fluids.
Main Results:
- The solid/liquid composite packaging decoupled interface shear forces, reducing mechanical coupling errors.
- Silicone oil's hydrophobic and defect-filling properties slowed water infiltration, enhancing stability.
- Sensor accuracy improved to 0.5 mmHg, with drift below 2 mmHg over 30 days in simulated bodily fluids.
Conclusions:
- The proposed Parylene-C and silicone oil composite packaging offers a feasible solution for high-performance implantable pressure sensors.
- This method significantly enhances both the accuracy and long-term stability of implantable pressure sensors.
- The technique addresses critical packaging challenges for reliable in-vivo pressure monitoring.

