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Related Experiment Video

Updated: Jun 29, 2026

Polymeric Microneedle Array Fabrication by Photolithography

Polymeric Microneedle Array Fabrication by Photolithography

Published on: November 17, 2015

Ultrathin Microlens Arrays for Dynamic Beam Shaping Based on 3D Lithography.

Ruiqi Cheng^1,2, Yue Zhang^1,2, Shuo Chen^1,2

¹School of Integrated Circuits, Wuhan University, Wuhan 430072, China.

|February 27, 2026

Summary

This summary is machine-generated.

We developed a tunable beam shaper using ultra-thin microlens arrays (MLAs) for dynamic laser applications. This adaptable optical system allows real-time spot-size modulation, enhancing laser material processing capabilities.

Keywords:

3D lithography beam shaping dynamic tuning low-aspect-ratio

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Area of Science:

Optics and Photonics
Laser Technology
Materials Science

Background:

Conventional microlens arrays (MLAs) possess static focal properties, limiting adaptability in dynamic optical systems.
Post-fabrication adjustments for static MLAs are challenging, hindering real-time optical modulation.

Purpose of the Study:

To demonstrate a tunable beam shaper with real-time spot-size modulation capabilities.
To overcome the limitations of static focal properties in conventional MLAs for dynamic applications.

Main Methods:

Fabrication of ultra-thin MLAs with a low aspect ratio (1:187.5) and continuous surface profiles.
Optimization of 3D lithography and ion beam etching (IBE) workflows.
Implementation of adjustable axial displacement between a primary lens and the MLA for beam shaping.

Main Results:

Achieved an optical-grade surface finish with a roughness (Sa) of 3 nm on ultra-thin MLAs.
Demonstrated efficient beam homogenization with reconfigurable working distances and spot dimensions.
Enabled real-time spot-size modulation through tunable axial displacement.

Conclusions:

The proposed tunable beam shaper offers a versatile solution for advanced laser material processing.
This high-fidelity, low-profile component bridges the gap between static beam shaping and dynamic laser delivery.
The adaptable optical system enhances laser material processing by providing dynamic control over beam characteristics.