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Bias-Optimized Hydrogen Sensing in a Mo-Electrode Pd/SnO2 Thin-Film Sensor with Integrated Microheater
Dong-Chul Park1,2, Yong-Kweon Kim1
1Department of Electrical and Computer Engineering, Seoul National University, Seoul 08826, Republic of Korea.
Sensors (Basel, Switzerland)
|February 27, 2026
Summary
A new hydrogen gas sensor using palladium-functionalized tin oxide offers reliable, low-ppm detection for fuel cell safety. Optimized bias and thermal control ensure stable performance at moderate temperatures, crucial for early leak detection.
Area of Science:
- Materials Science
- Chemical Engineering
- Sensor Technology
Background:
- Hydrogen's potential as a clean energy carrier is hindered by safety risks due to its flammability.
- Early-stage detection of hydrogen leaks is critical for safety in fuel cell vehicles and energy systems.
- Compact, reliable sensors with low-ppm detection capabilities at moderate temperatures are essential.
Purpose of the Study:
- To design, fabricate, and characterize a bias-optimized hydrogen gas sensor.
- To utilize a palladium-functionalized tin oxide (SnO2) thin film with molybdenum (Mo) electrodes and an integrated microheater.
- To achieve efficient and stable operation at moderate temperatures (250-280 °C) with low power consumption.
Main Methods:
- Fabrication of a SnO2 thin film sensor with Mo electrodes and a microheater.
- Optimization of SnO2 electrical and sensing properties via sputtering and annealing.
- Pd catalytic layer implementation to enhance hydrogen dissociation and surface reactions.
- Systematic optimization of sensing bias voltage to balance sensitivity and noise.
- Development of an automated platform for performance evaluation.
Main Results:
- The sensor demonstrated thermally efficient operation at 250-280 °C with low power consumption.
- Optimization of SnO2 and Pd layers led to enhanced hydrogen sensing performance.
- Bias optimization identified a trade-off between sensitivity and noise, enabling stable low-ppm detection.
- A limit of detection (LOD) of approximately 6.4 ppm was achieved.
- A novel figure of merit was introduced for quantitative assessment of low-concentration sensing.
Conclusions:
- The developed Mo-electrode Pd/SnO2 thin-film sensor is a robust platform for hydrogen leak detection.
- Bias optimization and integrated thermal control are key to achieving high performance.
- The sensor's capabilities are suitable for safety-critical applications in hydrogen energy systems.
Keywords:
Mo electrodeMo microheaterMo temperature sensorPd catalystSnO2 thin filmhydrogen gas sensorlimit of detection
