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Related Concept Videos

Super-resolution Fluorescence Microscopy01:37

Super-resolution Fluorescence Microscopy

Super-resolution fluorescence microscopy (SRFM) provides a better resolution than conventional fluorescence microscopy by reducing the point spread function (PSF). PSF is the light intensity distribution from a point that causes it to appear blurred. Due to PSF, each fluorescing point appears bigger than its actual size, and it is the PSF interference of nearby fluorophores that causes the blurred image. Various approaches to achieving higher resolution through SRFM have recently been developed.

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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Multi-NA metalens array for compact high-NA microscopy.

Alireza Khalilian, Jie Fan, Mohammad Serhan

    Optics Letters
    |February 27, 2026
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    Summary
    This summary is machine-generated.

    We developed a silicon-rich nitride metalens array for compact microscopy, integrating multiple high numerical apertures (NA) on a single chip for advanced bio-imaging applications.

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    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Biomedical Engineering

    Background:

    • Compact microscopy requires advanced optical components capable of high resolution.
    • Metalenses offer miniaturization potential by integrating optical functions onto a single surface.
    • Achieving multiple numerical apertures (NA) on a single metalens platform is crucial for versatile imaging.

    Purpose of the Study:

    • To demonstrate a silicon-rich nitride (SRN) metalens array for visible-band microscopy.
    • To integrate multiple high numerical apertures (NA) onto a single chip.
    • To verify the performance and applicability of the metalens array in bio-imaging.

    Main Methods:

    • Fabrication of a metalens array using plasma-enhanced chemical vapor deposition (PECVD) of silicon-rich nitride (SRN).
    • Characterization of the metalens array's focusing performance, including focal confinement and efficiency at 660 nm.
    • Fluorescence imaging experiments using AF647-tagged endothelial monolayers to assess functional readiness.

    Main Results:

    • Demonstrated an SRN metalens array operating at 660 nm with integrated NA values of 0.54, 0.92, and 0.97.
    • Achieved tight focal confinement and high focusing efficiency due to the high, tunable refractive index and low absorption of the tailored SRN material.
    • Verified functional readiness through successful fluorescence imaging of endothelial cells.

    Conclusions:

    • The developed SRN metalens array enables compact, multi-NA microscopy platforms.
    • The wafer-scalable fabrication process supports the integration of high-NA modules for advanced bio-imaging systems.
    • This technology advances the development of miniaturized, high-performance optical systems for biological research.