Multi-NA metalens array for compact high-NA microscopy

Compact visible-band microscopy benefits from co-planar metalenses that integrate multiple numerical apertures on a single platform. Here, we demonstrate a silicon-rich nitride (SRN) metalens array operating at 660 nm, uniting NA = 0.54/0.92/0.97 within one chip. Device-level characterization confirms tight focal confinement and high focusing efficiency, arising from our tailored PECVD SRN that provides a high, tunable refractive index with low absorption. Fluorescence imaging of AF647-tagged endothelial monolayers verifies functional readiness, and the wafer-scalable process supports compact, high-NA modules for integrated bio-imaging systems.