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Nanoparticle size determination via through-focus scanning polarized microscopy.

Wenhui Zhou, Chunjie Zhai, Zhaolou Cao

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    |February 27, 2026
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    Through-focus scanning polarized microscopy (TSPM) offers efficient nanoparticle characterization. This new method accurately estimates nanoparticle parameters using polarization-resolved images, benefiting material sciences and semiconductor industries.

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    Area of Science:

    • Nanotechnology
    • Optical Microscopy
    • Materials Science

    Background:

    • Accurate characterization of sub-micron nanoparticles is crucial for scientific and industrial applications.
    • Existing methods may lack efficiency or sensitivity for nanoscale object analysis.

    Purpose of the Study:

    • To introduce and validate Through-Focus Scanning Polarized Microscopy (TSPM) for efficient nanoparticle parameter estimation.
    • To demonstrate the capability of TSPM in relating nanoparticle physical properties to optical measurements.

    Main Methods:

    • Utilizing numerical simulations to model nanoparticle interactions with polarized light.
    • Conducting experimental measurements using TSPM to capture in-focus and out-of-focus polarization-resolved images.
    • Correlating optical data with physical nanoparticle parameters.

    Main Results:

    • Demonstrated the feasibility and accuracy of TSPM through combined simulation and experimental validation.
    • Established a relationship between nanoparticle properties and TSPM image characteristics.
    • Showcased TSPM's high sensitivity for nanoscale metrology.

    Conclusions:

    • TSPM is a practical and versatile tool for quantitative nanoparticle analysis.
    • The method holds significant potential for material sciences and semiconductor industries.
    • TSPM enables highly sensitive metrology of nanoscale objects.