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Q-optimised nanoelectromechanical diamond resonators.

Evan L H Thomas1,2, Soumen Mandal3, William G S Leigh3

  • 1School of Physics and Astronomy, Cardiff University, Queen's Buildings, Cardiff, UK. thomas@impt.uni-hannover.de.

Microsystems & Nanoengineering
|March 2, 2026
PubMed
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Nanocrystalline diamond (NCD) resonators show promise for high-frequency applications. Free-free geometries significantly reduce energy loss, achieving high quality factors and minimizing dissipation for advanced nanomechanical devices.

Area of Science:

  • Physics
  • Materials Science
  • Nanotechnology

Background:

  • Nanomechanical resonators are crucial for applied and fundamental physics.
  • Nanocrystalline diamond (NCD) is suitable for high-frequency devices due to its high Young's modulus and substrate compatibility.
  • Device miniaturization increases significance of dissipation from clamping and surface loss.

Purpose of the Study:

  • To investigate dissipation mechanisms in NCD nanomechanical resonators.
  • To compare doubly clamped and free-free resonator geometries.
  • To assess the impact of surface polishing on resonator performance.

Main Methods:

  • Fabrication of doubly clamped beams and free-free resonator geometries from as-grown and chemically mechanically polished NCD.

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  • Measurement of resonator quality factors (Q factors) at 12 K.
  • Analysis of length-dependent loss and surface-related dissipation.

    • Main Results:

    • Free-free geometries reduced dissipation by up to 8.8× compared to doubly clamped beams.
    • Q factors reached approximately 10,000 for free-free resonators operating between 40 MHz and 100 MHz.
    • Minimal differences in dissipation between as-grown and polished NCD suggest low surface loss at 12 K.

    Conclusions:

    • Free-free geometries effectively suppress dissipation in NCD nanomechanical resonators.
    • NCD exhibits low surface-related loss at cryogenic temperatures.
    • The combination of NCD and free-free designs offers a promising pathway for high-frequency nanomechanical resonators with minimized dissipation.