Atomic ribbon formation in the pulsed laser patterning of WS2 layers
Yaowu Hu1,2,3, Zifeng Wang2, Zequn Zhang2
1School of Integrated Circuits, Wuhan University, Wuhan, 430072, China.
None:
The precise modulation of the thickness of two-dimensional (2D) semiconductor transition metal disulfides (TMDs) by laser thinning techniques to tailor their electronic properties is recognized as a promising approach. However, achieving sub-diffractive patterning during layer-by-layer modulation is crucial for junction fabrication and device engineering. Herein, we report atomic nanoribbon generation in single-layer tungsten disulfide (WS2), namely, the atomic laser-induced periodic surface structure (atomic-LIPSS) effect, achieved by tuning the laser pulse width, energy and other processing parameters. We explore the structural evolution of WS2 during laser processing for monolayer and multilayer films and compare it with another more commonly encountered 2D material, MoS2. It is verified experimentally and by molecular dynamics simulations (MD) that such atomic nanoribbons can only be formed under the action of short-pulse (
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