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Vacuum Applications of Ionic Liquids: Fundamentals, Processing, and Emerging Interfaces.

Shingo Maruyama1, Yuji Matsumoto1

  • 1Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, Sendai, Miyagi 980-8579, Japan.

ACS Applied Materials & Interfaces
|March 12, 2026
PubMed
Summary

Ionic liquids (ILs) enable new vacuum engineering applications due to their low volatility. This review explores IL interfaces for advanced nanostructures, devices, and processing under vacuum.

Keywords:
devicesfabrication processesinterfacesionic liquidsvacuum analysis

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