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Updated: Mar 15, 2026

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid

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Tribological Behavior and Material Removal Mechanisms in Sapphire Lapping Using HFCVD Diamond-Coated Tools.

Wei Feng¹, Xiaokang Sun¹, Shuai Zhou¹

¹School of Mechanical Engineering, Yancheng Institute of Technology, Yancheng 224001, China.

Materials (Basel, Switzerland)

|March 14, 2026

Summary

Hot-filament chemical-vapor deposition (HFCVD) created diamond coatings with varied textures. Spherical diamond coatings yielded superior sapphire lapping surface finish, offering an efficient precision machining alternative.

Keywords:

HFCVD lapping sapphire wafer surface morphology tribological properties

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Published on: February 27, 2013

Area of Science:

Materials Science
Surface Engineering
Tribology

Background:

Diamond coatings offer unique properties for advanced applications.
Controlling surface morphology is crucial for optimizing coating performance.
Hot-filament chemical-vapor deposition (HFCVD) is a key technique for diamond film fabrication.

Purpose of the Study:

To fabricate diamond coatings with distinct surface textures using HFCVD.
To investigate the tribological behavior of these coatings during sapphire wafer lapping.
To establish material removal models based on coating morphology.

Main Methods:

Fabrication of diamond coatings with spherical, pyramidal, and prismatic textures via HFCVD.
Surface characterization using Scanning Electron Microscopy (SEM) and Raman Spectroscopy.
Surface roughness measurement using 3D optical microscopy and tribological testing during lapping.

Main Results:

Diamond films exhibited excellent deposition uniformity and high crystalline quality.
Surface roughness values (Ra) ranged from 0.423 μm to 0.809 μm.
Spherical diamond coatings achieved the finest surface finish (Ra 0.22 μm) with a material removal rate of 24.3 μm/min.

Conclusions:

The continuous multi-point contact geometry of spherical diamond coatings enhances surface finish.
The established material removal models correlate morphology with lapping performance.
Diamond-coated tools present a high-efficiency solution for precision machining of sapphire.