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Calcium Phosphate-Poly(methyl methacrylate) Composite Layers Synthetized in Radio-Frequency Magnetron Sputtering
Andreea Groza1, Maria E Hurjui1, Sasa A Yehia-Alexe1
1National Institute for Lasers, Plasma and Radiation Physics, 077125 Măgurele, Ilfov, Romania.
Polymers
|March 14, 2026
Summary
This study synthesized calcium phosphate-poly(methyl-methacrylate) composite layers using magnetron sputtering. Increasing radio-frequency power enhanced polymer dissociation and altered surface morphology, creating plasma polymers.
Area of Science:
- Materials Science
- Plasma Physics
- Surface Chemistry
Background:
- Magnetron sputtering is a key technique for thin film deposition.
- Controlling plasma parameters is crucial for tailoring composite material properties.
- Poly(methyl-methacrylate) (PMMA) is a versatile polymer for composite applications.
Purpose of the Study:
- To investigate the synthesis of calcium phosphate-poly(methyl-methacrylate) composite layers.
- To analyze the effect of radio-frequency (RF) power on plasma characteristics and layer composition.
- To understand the resulting surface morphology and chemical bonding.
Main Methods:
- Synthesis of composite layers on silicon substrates via magnetron sputtering.
- Measurement of electron energy distribution function (EEDF).
- Optical emission spectral analysis of the plasma mixture.
- Surface characterization of the deposited layers.
Main Results:
- RF power increase (50-150 W) shifted EEDF to lower energies, augmenting PMMA dissociation.
- Optical emission spectroscopy confirmed dissociation of PMMA and calcium phosphate components.
- Ca/P ratio increased from 1.72 to 1.9 with increasing RF power.
- Surface morphology transitioned from grain-like to worm-like plasma polymer structures.
Conclusions:
- RF power is a critical parameter influencing plasma dynamics and composite layer formation.
- Increased RF power leads to enhanced polymer dissociation and formation of plasma polymers.
- The observed morphological changes are linked to increased plasma ion density and layer thickness.
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