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Updated: Mar 15, 2026

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Hybrid LTCC-Polyimide Approach for High-Sensitivity Mechanical Sensing Applications.

Fares Tounsi1,2, Nesrine Jaziri2, Mahsa Kaltwasser2

  • 1SMALL Group, ICTEAM Institute, Université Catholique de Louvain, 1348 Louvain-la-Neuve, Belgium.

Sensors (Basel, Switzerland)
|March 14, 2026
PubMed
Summary
This summary is machine-generated.

This study introduces a novel hybrid Low-Temperature Co-Fired Ceramic (LTCC)/Kapton platform for advanced mechanical sensors. It achieves high sensitivity and mechanical compliance by integrating flexible polyimide with LTCC for tunable RF components.

Keywords:
Kapton® substrateLTCC technologyhigh sensitivity sensorsindium electroplatinglow-temperature bondingreflow solderingtunable RF components

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Mechanical Engineering

Background:

  • Traditional Low-Temperature Co-Fired Ceramic (LTCC) sensors face limitations in miniaturization and flexibility due to rigid multilayer structures.
  • Existing LTCC sensor designs struggle to achieve high mechanical compliance and sensitivity simultaneously.

Purpose of the Study:

  • To develop a novel hybrid LTCC/Kapton platform for high-sensitivity mechanical sensing.
  • To enable mechanically tunable RF passive components by overcoming the limitations of conventional LTCC sensors.
  • To demonstrate a fabrication process for a compliant and robust hybrid sensor platform.

Main Methods:

  • Integration of a flexible polyimide membrane onto an LTCC substrate using electroplated indium pillars.
  • Creation of tunable inductance via metal-shielding proximity effects.
  • Creation of tunable capacitance through force-controlled air-gap modulation in a metal-insulator-metal configuration.
  • Utilizing 3D surface profiling and impedance measurements for characterization.

Main Results:

  • Achieved a 48% inductance tuning range with a sensitivity of 0.715 nH/mN.
  • Demonstrated a 36% capacitance tuning range with a sensitivity of 47.3 fF/mN at 1 MHz.
  • Fabrication process ensures precise gap control, high compliance, and structural robustness.

Conclusions:

  • The hybrid LTCC/Kapton platform offers a compact, scalable solution for high-sensitivity mechanical sensors.
  • The developed platform is suitable for mechanically reconfigurable RF components in harsh environments and adaptive electronics.
  • This approach overcomes the rigidity and thickness constraints of traditional LTCC sensors.