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Raman Microspectroscopy for Structural Indication in Ultrafast Laser Writing.

Xingrui Cheng1, Eugenio Picheo2, Zhixin Chen1,2

  • 1Department of Engineering Science, University of Oxford, Oxford, UK.

Small Methods
|March 16, 2026
PubMed
Summary

Raman microspectroscopy monitors femtosecond laser fabrication of diamond devices. Depletion of a specific Raman line predicts electrical resistance, improving scalability and yield for laser microfabrication.

Keywords:
Raman microspectroscopydiamond electrodesdiamond graphitizationfemtosecond laser writingin‐situ metrology

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Spectroscopy

Background:

  • Femtosecond laser microfabrication offers versatile device creation but faces scalability challenges due to limited real-time monitoring.
  • Accurate, in situ performance metrics are crucial for optimizing laser fabrication processes.

Purpose of the Study:

  • To demonstrate Raman microspectroscopy as a non-destructive tool for assessing the electrical performance of laser-written graphitic electrodes in diamond.
  • To identify reliable spectral indicators correlating with device resistance for improved fabrication control.

Main Methods:

  • Combined hyperspectral Raman mapping with in situ electrical testing of laser-fabricated graphitic electrodes in diamond.
  • Analyzed spectral features, focusing on the 1332 cm⁻¹ sp³ Raman line, to correlate with electrical resistance.
  • Applied hyperspectral unmixing for label-free identification of spectral signatures in complex fabrication scenarios.

Main Results:

  • The depletion of the 1332 cm⁻¹ sp³ Raman line was identified as a monotonic and robust predictor of electrode resistance.
  • This spectral feature offers superior correlation with electrical performance compared to other commonly used Raman signatures.
  • Hyperspectral unmixing successfully identified relevant spectral markers even when traditional Raman signals were less distinct.

Conclusions:

  • Raman microspectroscopy, particularly monitoring the 1332 cm⁻¹ sp³ line, provides a practical in situ metric for evaluating laser-written graphitic electrodes in diamond.
  • The developed methodology enhances control and predictability in femtosecond laser microfabrication, paving the way for specification-driven processes.
  • This approach is adaptable to various host materials and functionalities, broadening its applicability in advanced manufacturing.