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Updated: Mar 19, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Generation and control of structured digital holographic moiré patterns using position sensing detection
Abstract:
This paper provides a detailed description of the generation and control of structured moiré patterns produced by digital holography. We will present a detailed description of the simple optical procedures and instrumental operations that facilitate the generation of these patterns with convenient geometries using a segmented optical detector PSD (position sensing detector) as an optical element, basically for the control of spatial frequencies, systematically monitoring the incidence of one of the illumination beams in the holographic process. Some of the applications that have already been demonstrated using these procedures include profilometry and numerical representation, while others, such as structured illumination microscopy (SIM), are still under development.

