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Related Experiment Video

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Multidirectional lateral shearing random-step instantaneous phase-shifting interferometry for aspherical measurement.

Yahui Zhu, Bingbing Jiang, Yang Gu

    Applied Optics
    |March 17, 2026
    PubMed
    Summary
    This summary is machine-generated.

    A new multi-directional lateral shearing instantaneous phase-shifting interferometry (MLSIPSI) method improves aspheric surface testing accuracy. This advanced interferometry technique offers superior precision for steep asphericity departures compared to existing methods.

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    Area of Science:

    • Optical metrology
    • Interferometry
    • Aspheric surface analysis

    Background:

    • Accurate measurement of aspheric surfaces is crucial for optical system performance.
    • Existing methods like quadriwave lateral shearing interferometry (QWLSI) have limitations in precision for steep aspheric departures.

    Purpose of the Study:

    • To propose and experimentally validate a novel multi-directional lateral shearing instantaneous phase-shifting interferometry (MLSIPSI) method.
    • To enhance measurement accuracy for aspheric surface wavefronts.

    Main Methods:

    • Development of an MLSIPSI experimental system incorporating phase-shifting technology.
    • Measurement of aspherical mirrors with varying asphericities (4 µm and 10 µm).
    • Comparison of MLSIPSI results with LUPHOSscan profilometer data and QWLSI baseline measurements.

    Main Results:

    • The MLSIPSI system achieved an RMS relative error accuracy better than λ/150.
    • Measurement errors were reduced by 27.06% and 32.05% compared to QWLSI.
    • Experimental validation confirmed superior precision for steep asphericity departures.

    Conclusions:

    • The proposed MLSIPSI method significantly enhances measurement accuracy for aspheric surfaces.
    • MLSIPSI demonstrates superior precision, particularly for challenging steep aspheric departures.
    • The findings validate MLSIPSI as a highly precise technique for aspheric surface metrology.