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Implementation of a Reference Interferometer for Nanodetection

Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

Sub-nanometer displacement measurement vortex interferometer combining speckle-based feedback alignment and global

Tao Hu, Shuhang Zhuo, Chong Liu

|March 17, 2026

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This study introduces a new vortex interferometer that uses speckle-correlation feedback for automatic beam alignment. This method significantly improves high-precision displacement measurement accuracy by correcting misalignment and reducing errors to sub-nanometer levels.

Area of Science:

Optical metrology
Interferometry
Precision measurement

Background:

Vortex beam interferometry is crucial for high-precision displacement measurement.
Beam misalignment causes interference pattern distortion and measurement errors.

Purpose of the Study:

To develop a vortex interferometer with enhanced accuracy.
To address measurement errors caused by beam misalignment.

Main Methods:

Speckle-correlation feedback for automatic beam alignment.
Global Zernike polynomial fitting for aberration elimination.
Piston term extraction for displacement calculation.

Main Results:

Reduced residual standard deviation from 3.85 nm to 0.517 nm in 10 nm step tests.

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Related Experiment Videos

Last Updated: Mar 19, 2026

Implementation of a Reference Interferometer for Nanodetection

Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

Scanning SQUID Study of Vortex Manipulation by Local Contact

Scanning SQUID Study of Vortex Manipulation by Local Contact

Published on: February 1, 2017

A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings

A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings

Published on: September 30, 2019

Restored interference quality through automatic alignment.

Achieved sub-nanometer measurement precision.

Conclusions:

The proposed vortex interferometer effectively corrects beam misalignment.
Speckle-correlation feedback and Zernike fitting ensure high-accuracy displacement measurements.
Sub-nanometer precision is achievable in vortex beam interferometry.