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    This study introduces a graphics processing unit-assisted technique to accurately retrieve phase from noisy interferograms. The method enhances computational speed and precision for nanoscale surface profile measurements.

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    Area of Science:

    • Metrology and Optical Engineering
    • Computational Science

    Background:

    • Optical interferometry is crucial for nanoscale surface profiling in precision metrology.
    • Accurate phase retrieval from interferograms is essential but challenged by noise and amplitude variations.
    • Existing methods often suffer from high computational costs and limited robustness.

    Purpose of the Study:

    • To develop an efficient and robust phase retrieval technique for optical interferometry.
    • To address challenges posed by severe noise and non-uniform amplitude fluctuations in interferograms.
    • To improve computational speed and accuracy in nanoscale surface metrology.

    Main Methods:

    • Implementation of a second-order optimization technique.
    • Leveraging graphics processing unit (GPU) acceleration for enhanced computation.
    • Demodulation of interferograms with simulated and experimental noise and amplitude variations.

    Main Results:

    • The proposed GPU-assisted method demonstrates significant computational gain.
    • Robust phase estimation accuracy is achieved even with severe noise and amplitude fluctuations.
    • Successful application in nanoscale surface profile measurement using diffraction phase microscopy.

    Conclusions:

    • The developed technique offers a powerful solution for processing noisy interferograms in optical metrology.
    • GPU acceleration significantly enhances the efficiency of phase retrieval algorithms.
    • The method provides a practical and accurate approach for nanoscale surface characterization.