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Updated: Mar 19, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Seidel-based position-dependent aberration correction in Fourier holography
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This work presents a framework for modeling, measuring, and correcting position-dependent pupil aberrations in Fourier holography. Aberrations are characterized by six coefficients: four Seidel terms, tip, and tilt. Two efficient diffraction integral approximations are developed: a series expansion for defocus-like aberrations and a patch-based method for the general case. The coefficients are estimated by scanning over a range of values to optimize correction on a grid of target markers. Experiments on a compact Fourier holographic projector demonstrate substantial improvements in image sharpness across the entire field of view.

