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Single-shot common-path Fizeau interferometer for vibration-insensitive nanometric displacement measurement.
Optics Express
|March 18, 2026
Summary
This study introduces a novel Fizeau interferometer for precise micro-displacement measurement. The system achieves real-time, vibration-insensitive nanometric metrology for dynamic monitoring.
Area of Science:
- Optical Metrology
- Precision Engineering
- Nanotechnology
Background:
- Traditional interferometers are sensitive to environmental vibrations and air turbulence.
- Real-time dynamic displacement monitoring requires high-speed, robust measurement techniques.
Purpose of the Study:
- To develop a single-shot, common-path Fizeau interferometer for high-precision micro-displacement measurement.
- To enhance robustness against environmental disturbances and enable real-time dynamic monitoring.
Main Methods:
- Integration of a wire-grid polarizer with a pixelated polarization camera.
- Implementation of spatial polarization phase-shifting for real-time phase retrieval.
- Utilizing a common-path configuration and single-exposure acquisition for vibration insensitivity.
Main Results:
- Demonstrated measurement of displacements as small as 2 nm with high repeatability.
- Achieved real-time phase retrieval and dynamic displacement monitoring.
- The system exhibited significant robustness against environmental vibrations and air turbulence.
Conclusions:
- The proposed compact, vibration-insensitive Fizeau interferometer is a robust solution for dynamic nanometric metrology.
- The single-shot, common-path design enables high-precision micro-displacement measurements in challenging environments.
- This technology advances precision engineering applications requiring real-time nanometric measurements.
