Nano-opto-electro-mechanical nano-kirigami metasurface for on-chip dynamic spectral shaping

Dynamic spectral shaping at the nanoscale has been limited by large free-space setups and slow response times. Here, we propose a fully pixelated nano-opto-electro-mechanical nano-kirigami metasurface that enables arbitrary on-chip spectral synthesis within a 9 × 9 μm² area. By exploiting 2D-to-3D morphological transformations of nano-kirigami metasurfaces that tailor the resonance wavelength and the ratio of radiation loss to intrinsic loss of a Fabry-Pérot (FP)-like cavity, the device achieves broadband tunability (>200 nm), as well as versatile single- and multi-mode spectral shaping capabilities at the pixel level. Combined with a Bayesian optimization inverse-design framework, we demonstrate accurate reconstruction of arbitrary reflectance spectra, with a root-mean-square error below 0.1. This work establishes a promising pathway toward compact, programmable spectral processors for applications in spectroscopy, imaging, and communication.