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Robust 5 W continuous-wave 355 nm laser by single-pass third harmonic generation in LBO crystals.
Optics Express
|March 18, 2026
Summary
A new continuous-wave 355 nm laser was developed using third-harmonic generation in LBO crystals. This high-power, stable laser system shows promise for semiconductor manufacturing applications.
Area of Science:
- Optics and Photonics
- Laser Physics
- Materials Science
Background:
- Continuous-wave (CW) lasers are essential for various industrial applications.
- Third-harmonic generation (THG) is a key nonlinear optical process for generating shorter wavelengths.
- Lithium triborate (LBO) crystals are widely used for nonlinear frequency conversion.
Purpose of the Study:
- To develop a high-power, narrow-linewidth, continuous-wave 355 nm laser.
- To investigate phase-matching techniques for efficient third-harmonic generation.
- To assess the performance and potential applications of the developed laser system.
Main Methods:
- Single-pass third-harmonic generation (THG) of a fiber laser in two LBO crystals.
- Investigation of both type I and type II critical phase-matching (PM) in LBO for sum-frequency generation.
- Characterization of output power, power stability, and relative intensity noise.
Main Results:
- A maximum output power of 5 W was achieved using a type-I critical phase-matching LBO crystal.
- A single-pass conversion efficiency of 1.7% from 1064 nm to 355 nm was obtained.
- The relative intensity noise was below -110 dB/Hz for frequencies above 200 Hz, with 0.73% power stability.
Conclusions:
- A robust and compact single-pass THG laser system at 355 nm was successfully demonstrated.
- The laser system exhibits high power, good stability, and low noise, making it suitable for demanding applications.
- The developed laser has significant potential for applications in semiconductor manufacturing and inspection.

