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Updated: Mar 19, 2026

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In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
Published on: May 13, 2020
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Threshold Switching Behavior and Underlying Mechanisms in Pure SiO2-Based Selectors.
Hye Rim Kim1, Tae Jung Ha2, Jeong Hwan Song2
1Department of Materials Science and Chemical Engineering, Hanyang University, Ansan 15588, Republic of Korea.
ACS Applied Materials & Interfaces
|March 18, 2026
Summary
We developed a novel pure silicon dioxide (SiO2) selector for crossbar memory. This device exhibits stable threshold switching (TS) over 10^9 cycles, promising improved memory integration.
Area of Science:
- Materials Science
- Electrical Engineering
- Semiconductor Physics
Background:
- Selector devices are vital for suppressing sneak-path currents in high-density crossbar array memory.
- Conventional selectors often rely on complex materials like chalcogenides or metal oxides.
Purpose of the Study:
- To propose and demonstrate a pure silicon dioxide (SiO2)-based selector for crossbar memory applications.
- To elucidate the fundamental mechanisms behind the threshold switching behavior in SiO2 selectors.
Main Methods:
- Fabrication of SiO2 selectors using conventional semiconductor processes.
- Experimental characterization of threshold switching (TS) behavior, including endurance testing.
- Interface structure analysis and controlled pulse-based electrical characterization.
Main Results:
- Demonstrated stable TS characteristics with endurance exceeding 10^9 cycles.
- Identified oxygen vacancy formation, structural asymmetry, and dynamic charging as key TS mechanisms.
- Optimized pulse conditions for reliable TS operation were established.
Conclusions:
- The pure SiO2 selector offers a simple, CMOS-compatible alternative to conventional selectors.
- Low-temperature fabrication (<300 °C) and tunable threshold voltage enable excellent integration with advanced memory devices.
- This work presents a promising pathway for highly integrated, silicon-compatible memory selectors.
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