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Updated: Mar 25, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Origin of Bright Quantum Emissions with a High Debye-Waller Factor in Silicon Nitride
Shibu Meher1, Manoj Dey1, Abhishek Kumar Singh1
1Materials Research Centre, Indian Institute of Science, Bangalore 560012, India.
Abstract:
Silicon nitride has emerged as a promising photonic platform for integrated single-photon sources, yet the microscopic origin of the recently observed bright quantum emissions remains unclear. Using hybrid density functional theory, we show that the negatively charged NSiVN center (NV-) in the C1h configuration exhibits a linearly polarized zero phonon line (ZPL) at 2.46 eV, with a radiative lifetime of 9.01 ns and a high Debye-Waller (DW) factor of 33%. We further find that the C1h configuration is prone to a pseudo-Jahn-Teller distortion, yielding two symmetrically equivalent defect structures that emit bright, linearly polarized ZPL at 1.80 eV with a lifetime of 10.17 ns and an increased DW factor of 41%. These nitrogen-vacancy-related defects explain the origins of visible quantum emissions, paving the way for deterministic and monolithically integrated silicon nitride quantum photonics.
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