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Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication
Published on: November 28, 2017
Medium-scale integrated circuits based on p-type 2D semiconducting MoTe2
Hui Wang1, Zebang Luo1, Biyuan Zheng1
1Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, Hunan Institute of Optoelectronic Integration, College of Materials Science and Engineering, Hunan University, Changsha, China.
Abstract:
Two-dimensional (2D) semiconductors hold promise for next-generation electronics, yet the lack of scalable p-type counterparts remains a major bottleneck, with prior studies largely limited to discrete devices or simple circuits. Here we report the realization of medium-scale integrated circuits (MSICs) based on wafer-scale p-type 2D semiconductors, enabled by the controlled synthesis of uniform 4-inch 2H-MoTe2 films. A precursor-engineering strategy that integrates thickness-tunable Mo precursors with a sustained-release chalcogen supply enables deterministic thickness control and wafer-scale uniformity. The resulting p-type transistors exhibit highly reproducible characteristics, including on/off ratios of ~105 and mobilities of ~7 cm2 V-1 s-1under low operating voltages. Leveraging a device density exceeding 1300 cm-2, we demonstrate a 140-transistor full adder, showing the potential of our approach towards the realization of future large-scale 2D complementary metal-oxide-semiconductor (CMOS) circuits.
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