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Reconfigurable, Temperature Resilient Phase-Change Metasurfaces Fabricated via High Throughput Nanoimprinting
Carlota de Ruiz de Galarreta1,2, Yinghao Zhao1,3, Jose Mendoza-Carreño1
1Institute of Materials Science of Barcelona ICMAB-CSIC, Bellaterra, Spain.
Advanced Science (Weinheim, Baden-Wurttemberg, Germany)
|March 26, 2026
Summary
Researchers developed a scalable method for creating reconfigurable metasurfaces using nanoimprint lithography and phase-change materials. This breakthrough enables robust, large-area photonic devices with tunable optical properties for diverse applications.
Area of Science:
- Nanophotonics and Metasurface Engineering
- Materials Science and Engineering
- Lithography and Nanofabrication
Background:
- Metasurfaces combined with chalcogenide phase-change materials offer multifunctional and reconfigurable nanophotonic device potential.
- Existing methods face challenges in scalable, large-area fabrication and thermal stability for phase-change processes, hindering real-world applications.
Purpose of the Study:
- To present a scalable nanofabrication strategy for producing thermally robust, reconfigurable metasurfaces.
- To overcome limitations of conventional nanoimprinting for phase-change material integration in free-space photonic applications.
Main Methods:
- Employed high-throughput, large-area nanoimprint lithography compatible with chalcogenide phase-change materials.
- Utilized direct imprinting of high-melting-point, thermally stable titanium dioxide (TiO2) nanoparticle pastes.
- Deposited antimony selenide (Sb2Se3) thin films as the active phase-change material layer.
Main Results:
- Successfully fabricated thermally robust metasurfaces via scalable nanoimprint lithography.
- Demonstrated tunable spectral band switching and amplitude modulation in the near- to mid-infrared.
- Showcased reconfigurable chiral metasurfaces with switchable chiroptical activity in visible and near-infrared ranges.
- Achieved excellent agreement between experimental results and numerical simulations with high uniformity across large areas.
Conclusions:
- Developed a universal, thermally robust, and scalable platform for reconfigurable metasurfaces using phase-change materials.
- Paved the way for low-cost photonic devices with dynamic optical responses.
- The fabrication strategy has broad potential for advanced nanophotonic device development beyond demonstrated applications.
