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Transient Charge Collection in Ultra-Thin SiC Membranes for Single-Ion Detection
Enrico Sangregorio1, Alfio Samuele Mancuso1,2, Saverio De Luca1
1Consiglio Nazionale delle Ricerche-Istituto per la Microelettronica e Microsistemi (CNR-IMM), VIII Strada n°5, 95121 Catania, Italy.
Sensors (Basel, Switzerland)
|March 28, 2026
Summary
Ultra-thin silicon carbide (SiC) membrane detectors offer superior performance for single-ion detection. Removing the substrate minimizes diffusion-induced current, ensuring precise timing and minimal charge loss in harsh environments.
Area of Science:
- Materials Science
- Semiconductor Physics
- Detector Technology
Background:
- Silicon carbide (SiC) detectors are radiation-hard and fast, suitable for harsh environments.
- Understanding charge collection dynamics is crucial for optimizing SiC detector performance.
Purpose of the Study:
- Investigate charge-collection dynamics in ultra-thin membrane SiC detectors.
- Compare transient responses of membrane and bulk SiC detector geometries.
- Analyze the impact of substrate removal on detector performance.
Main Methods:
- Time-dependent TCAD simulations of electron-hole pair generation by ions.
- 2D simulations for time-resolved characterization of current density.
- Comparison of bulk and membrane SiC detector architectures.
Main Results:
- Both bulk and membrane SiC detectors show prompt drift-driven current components.
- SiC membrane detectors exhibit a rapid secondary component (<3.5 × 10-10 s) at zero bias.
- Bulk SiC detectors display a prolonged secondary component and a substrate-induced diffusion tail.
Conclusions:
- SiC membrane detectors are ideal for single-ion detection due to their fast response.
- Removing the substrate significantly reduces diffusion-dominated current.
- These findings aid in fabricating optimized SiC detectors for quantum technologies.
Keywords:
TCAD simulationscharge collection dynamicsdeterministic ion implantationmembrane sensorsilicon carbide detectors
