A cochlea bio-inspired tunable piezoelectric cantilever array MEMS microphone: comprehensive study.

Area of Science:

• Bio-inspired engineering
• Acoustic sensing
• MEMS technology

Background:

• Mammalian cochlear mechanics involve complex dynamics for hearing.
• Existing hearing aids lack adaptive auditory capabilities.
• Piezoelectric MEMS microphones offer potential for advanced acoustic sensing.

Purpose of the Study:

• To develop a bio-inspired MEMS microphone emulating cochlear mechanics.
• To replicate sensory transduction, stiffness modulation, and energy redistribution.
• To achieve tunable performance using piezoelectric effects and dual modulation.

Main Methods:

• Design and fabrication of an AlN-piezoelectric MEMS microphone with a cantilever structure.
• Incorporation of piezoelectric and converse piezoelectric effects.
• Implementation of dual parametric modulation mechanisms for tunability.

Main Results:

• The device successfully replicated key cochlear mechanics.
• Achieved a baseline sensitivity of -25.38 dB/Pa and SNR up to 79.28 dB.
• Demonstrated a tunable quality factor with a 124.72% span.

Conclusions:

• The developed MEMS microphone is the first to fully mimic simultaneous sensing and tuning of the mammalian cochlea.
• Novel tuning mechanisms enable adaptive performance without mechanical modification.
• This technology paves the way for next-generation hearing aids and intelligent acoustic sensors.