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The Cochlea

The Cochlea

The cochlea is a coiled structure in the inner ear that contains hair cells—the sensory receptors of the auditory system. Sound waves are transmitted to the cochlea by small bones attached to the eardrum called the ossicles, which vibrate the oval window that leads to the inner ear. This causes fluid in the chambers of the cochlea to move, vibrating the basilar membrane.

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A cochlea bio-inspired tunable piezoelectric cantilever array MEMS microphone: comprehensive study.

Zhuoyue Zheng¹, Qingqing Ke², Huahuang Luo²

¹Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.

Microsystems & Nanoengineering

|March 29, 2026

Summary

This study presents a novel bio-inspired MEMS microphone that mimics cochlear mechanics for advanced hearing aids. The device offers tunable performance, replicating key auditory functions with high sensitivity and signal-to-noise ratio.

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Area of Science:

Bio-inspired engineering
Acoustic sensing
MEMS technology

Background:

Mammalian cochlear mechanics involve complex dynamics for hearing.
Existing hearing aids lack adaptive auditory capabilities.
Piezoelectric MEMS microphones offer potential for advanced acoustic sensing.

Purpose of the Study:

To develop a bio-inspired MEMS microphone emulating cochlear mechanics.
To replicate sensory transduction, stiffness modulation, and energy redistribution.
To achieve tunable performance using piezoelectric effects and dual modulation.

Main Methods:

Design and fabrication of an AlN-piezoelectric MEMS microphone with a cantilever structure.
Incorporation of piezoelectric and converse piezoelectric effects.
Implementation of dual parametric modulation mechanisms for tunability.

Main Results:

The device successfully replicated key cochlear mechanics.
Achieved a baseline sensitivity of -25.38 dB/Pa and SNR up to 79.28 dB.
Demonstrated a tunable quality factor with a 124.72% span.

Conclusions:

The developed MEMS microphone is the first to fully mimic simultaneous sensing and tuning of the mammalian cochlea.
Novel tuning mechanisms enable adaptive performance without mechanical modification.
This technology paves the way for next-generation hearing aids and intelligent acoustic sensors.