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A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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The early pioneers of microscopy opened a window into the invisible world of microorganisms. In 1830, Joseph Jackson Lister created an essentially modern light microscope. The 20th century saw the development of microscopes that leveraged nonvisible light, such as fluorescence microscopy that uses an ultraviolet light source and electron microscopy that uses short-wavelength electron beams. These advances significantly improved magnification, image resolution, and contrast. By comparison, the...
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Updated: Mar 31, 2026

Using Laser Scanning Microscopy to Determine Electromigration in Molybdenum Disilicide
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A Systematic Scanning Electron Microscopy Study on MoS2 Layers Using In-lens Detector and Everhart-Thornley Detector.

Yixin Liu1,2, Chao Wang1,2, Wanqing Chen1,2

  • 1School of Electronics and Information Engineering, Hebei University of Technology, No. 5340, Xiping Road, Beichen Distinct, Tianjin 300130, P. R. China.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|March 30, 2026
PubMed
Summary

Scanning electron microscopy (SEM) reveals optimal contrast for molybdenum disulfide (MoS2) layers using the in-lens detector, even at high voltages. Contrast reversal observed with the Everhart-Thornley detector offers insights into MoS2 characterization.

Keywords:
MoS2acceleration voltage and working distancecontrast reversalin-lens detector and Everhart–Thornley detectorscanning electron microscopy

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Area of Science:

  • Materials Science
  • Surface Science
  • Nanotechnology

Background:

  • Molybdenum disulfide (MoS2) is a key transition metal dichalcogenide with diverse electronic properties.
  • Characterizing MoS2 layers, especially monolayer films, using Scanning Electron Microscopy (SEM) is crucial for understanding their behavior.
  • Optimizing SEM imaging parameters is essential for accurate material analysis.

Purpose of the Study:

  • To systematically investigate the SEM imaging contrast of monolayer MoS2 on different substrates.
  • To compare the effectiveness of in-lens and Everhart-Thornley detectors for MoS2 imaging.
  • To elucidate the mechanisms behind contrast variations with changing SEM parameters.

Main Methods:

  • Systematic SEM imaging of CVD-grown and exfoliated MoS2 on SiO2/Si and Si substrates.
  • Utilized both in-lens and Everhart-Thornley detectors.
  • Varied acceleration voltage and working distance during imaging.

Main Results:

  • The in-lens detector provides superior MoS2 contrast, appearing darker than the substrate (mass-thickness contrast), even at 10 kV and 20 mm working distance.
  • The Everhart-Thornley detector exhibits contrast reversal: MoS2 appears brighter (atomic number contrast) at ≤10 mm and darker at ≥15 mm working distance.
  • The study analyzed secondary electron (SE) responses to explain contrast mechanisms.

Conclusions:

  • The in-lens detector is highly effective for MoS2 SEM characterization, offering consistent and superior contrast.
  • Understanding contrast mechanisms with different detectors and parameters is vital for accurate MoS2 analysis.
  • These findings facilitate improved SEM characterization of MoS2 and other transition metal dichalcogenides.