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Scanning Electron Microscopy01:07

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Microstructure analysis of low electron density contrast metallic multilayers using resonant X-ray reflectivity.

P N Rao1, M K Swami1, H Srivastava1

  • 1Accelerator Physics and Synchrotrons Utilization Division, Raja Ramanna Centre for Advanced Technology, Indore 452013, India.

Journal of Synchrotron Radiation
|April 2, 2026
PubMed
Summary

Resonant X-ray reflectivity (RXRR) enhances microstructural analysis of metallic multilayers. This technique provides superior sensitivity for low-contrast materials like Cu/Nb, improving characterization of layer properties.

Keywords:
electron densityinterfacesmetallic multilayersresonant X-ray reflectivity

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Area of Science:

  • Materials Science
  • Condensed Matter Physics
  • Surface Science

Background:

  • Metallic multilayers are crucial in various technological applications.
  • Characterizing low electron density contrast multilayers presents significant challenges.
  • Conventional X-ray reflectivity (XRR) often lacks sufficient sensitivity for these systems.

Purpose of the Study:

  • To demonstrate the enhanced sensitivity of Resonant X-ray reflectivity (RXRR) for microstructural analysis.
  • To investigate the microstructural properties (layer thickness, density, interface width) of Cu/Nb multilayers.
  • To compare RXRR performance with conventional XRR.

Main Methods:

  • Fabrication of Cu/Nb multilayers using magnetron sputtering.
  • X-ray reflectivity measurements performed at Cu and Nb K-absorption edges.
  • Comparison of reflectivity profiles obtained at resonant and non-resonant energies.

Main Results:

  • Pronounced differences in reflectivity profiles were observed between resonant and conventional XRR.
  • Enhanced contrast near absorption edges significantly improved data interpretation.
  • Accurate determination of layer thicknesses, densities, and interface widths was achieved.

Conclusions:

  • Resonant X-ray reflectivity (RXRR) is a powerful technique for characterizing metallic multilayers with low electron density contrast.
  • RXRR offers superior sensitivity compared to conventional XRR for such systems.
  • This method enables detailed microstructural analysis crucial for material optimization.