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Summary
This summary is machine-generated.

Accurate liquid flow measurement below 1 milliliter per minute is essential for many applications. This review compares nine principles for microflow sensors, aiding selection for specific tasks.

Keywords:
FlowmetryLiquid flow sensingMass flow ratesPico-/nano-/micro-flow sensorsVelocimetryVolumetric flow rates

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Area of Science:

  • Analytical Chemistry
  • Biomedical Engineering
  • Fluid Dynamics

Background:

  • Precise liquid flow measurement at sub-milliliter per minute scales is crucial for analytical and biomedical fields.
  • Existing flow sensors face challenges in accuracy, sensitivity, and environmental parameter interference.
  • Advancements in sensor design, manufacturing, and materials have improved performance metrics like limit of detection and response speed.

Purpose of the Study:

  • To comprehensively review liquid flow sensors operating in the sub-milliliter per minute domain.
  • To analyze critical structures and designs that enhance quantitative measurement of minute liquid flows.
  • To provide a comparative analysis of different flow sensing principles, their strengths, weaknesses, and performance metrics.

Main Methods:

  • Systematic literature review of publications spanning three decades on microflow sensing.
  • Analysis of nine distinct principles for quantitative flow sensing in the sub-milliliter per minute range.
  • Evaluation of structural designs, manufacturing methods, and materials impacting sensor performance.

Main Results:

  • Identification of nine key principles for sub-milliliter per minute liquid flow sensing.
  • Discussion of how novel designs and materials improve sensor performance and reduce environmental impacts.
  • Presentation of a comparative summary of performance metrics for different sensor types.

Conclusions:

  • A thorough understanding of various flow sensing principles is vital for developing advanced microflow meters.
  • The review aids in selecting appropriate sensors for specific microflow measurement tasks.
  • Future prospects in micro/nano/picoscale flowmetry face challenges and opportunities in further enhancing measurement capabilities.