Optimisation of EDS quantitative f-ratio method via ZAF correction

Area of Science:

• Materials Science
• Analytical Chemistry
• Physics

Background:

• Traditional f-ratio quantitative methods for CFE-SEM/EDS rely on complex real-time simulations.
• Matrix effects in quantitative analysis pose significant challenges for accuracy.
• Accurate elemental quantification is crucial for material characterization.

Purpose of the Study:

• To develop an efficient and accurate quantitative f-ratio method for CFE-SEM/EDS systems.
• To overcome the computational burden of traditional real-time simulation methods.
• To enable precise elemental analysis of samples with varying matrix compositions.

Main Methods:

• Proposed an 'preset curve + ZAF correction' strategy to replace real-time simulation.
• Utilized pre-constructed 'f-ratio vs. concentration' models from standard samples.
• Implemented an iterative approach to determine the absorption parameter (χ).
• Established f-ratio models for P-In, As-Ga, S-Zn, Se-Cd, and S-Fe systems.

Main Results:

• Successfully applied the ZAF correction f-ratio method to binary (As-In, Se-Zn) and ternary (S-As-Fe) systems.
• Demonstrated the effectiveness of preset curves and ZAF correction in compensating for matrix effects.
• Achieved satisfactory precision in quantitative f-ratio analysis of unknown samples.

Conclusions:

• The 'preset curve + ZAF correction' f-ratio method offers an efficient alternative to traditional simulation-based approaches.
• This method significantly enhances the accuracy and applicability of EDS quantitative analysis in CFE-SEM.
• The developed technique provides a robust solution for elemental quantification in complex materials.